NEXIV VMZ-SERIES
Higher speeds and greater precision than the VMA Series:
Magnification, AF and illumination conditions can be finely adjusted for each specimen. VMZ-R3020 offers a 300 x 200 mm stroke suitable for measurement of small components such as mechanical parts, molded parts and high-density PCBs.
Key benefits
- Six types of optical zooming head
- Detection of 0.1 mm transparent layer
- 8-segment ring illumination with three incident angles
- High measuring accuracy
- Faster throughput
- 15x high-speed zoom
Applications
- Surface analysis, Surface examination
- Plastic manufacturing, Metal manufacturing
- Cracks and Failure AnalysisI
- Micro-electronics, Opto-electronics
- Telecom & electronics, Antennae, Telescope optics
| Type 1 | |||||
| Optical magnification Total magnification Field of View (mm) | 0.5× 18× 9.33×7 | 1× 36× 4.67×3.5 |
2× 72× 2.33×1.75 | 4× 144× 1.165×0.875 | 7.5× 270× 0.622×0.467 |
| Type 2 | |||||
| Optical magnification Total magnification Field of View (mm) | 1× 36× 4.67×3.5 | 2× 72× 2.33×1.75 | 4× 144× 1.165×0.875 | 8× 288× 0.582×0.437 | 15× 540× 0.311×0.233 |
| Type 3 | |||||
| Optical magnification Total magnification Field of View (mm) | 2× 72× 2.33×1.75 | 4× 144× 1.165×0.875 | 8× 288× 0.582×0.437 | 16× 576× 0.291×0.218 | 30× 1080× 0.155×0.117 |
| Type A | |||||
| Optical magnification Total magnification Field of View (mm) | 0.35× 14× 13.3×10 | 0.6× 24× 7.8×5.8 |
1× 40× 4.7×3.5 |
1.8× 73× 2.6×1.9 |
3.5× 141× 1.33×1 |
Suitable for large components and "step-and-repeat" measurements of multiple pieces on the stage.
FEATURES AND BENEFITS OF THE NEXIV VMZ SERIES
Standard magnification zooming heads: type 1 - 3
Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.
High magnification zooming heads: type 4, TZ
Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.
Wide field-of-view zooming head: type A Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.
Measuring accuracy is further improved
Measuring accuracy is further improved with high resolution linear encoder 'ModuRay' developed by Nikon.
8-sector ring light system with three incident angles
Episcopic, diascopic and ring illuminations employ white LEDs and provide stability and long life. The new ring light system has three incident angles designed for correct edge capture.
*Except for Type A
SPECIFICATIONS OF THE NEXIV SERIES : VMZ 3020
| Stroke (X x Y x Z) | 300 x 200 x 200 mm (11.8 x 7.8 x 7.8 in.) 250 x 200 x 200 mm (9.8 x 7.8 x 7.8 in.) (with type TZ at low magnification) |
| Minimum readout | 0.01 µm |
| Maximum workpiece weight | 20 kg (44.1 lb.) |
| Measuring uncertainty | EUX,MPE EUY,MPE: 1.2+4L/1000 μm EUXY, MPE: 2+4L/1000 μm |
| Z measurement uncertainty | EUZ,MPE: 1.2+5L/1000 μm (with Laser AF) |
| Camera | Black & white 1/3” CCD, Color 1/3” CCD (option)* * For type 1, 2 and A only |
| Working distance | Type 1/2/3: 50 mm (with 37° illumination), 36 mm (with 55° illumination), 10 mm (with 78° illumination) Type 4: 30 mm Type TZ: 11 mm with the main objective lens and 32 mm with the left objective lens Type A: 73.5mm (63 mm with laser AF) |
| Magnification vs. field of view | Type 1: 0.5 - 7.5x / 9.33 x 7 - 0.622 x 0.467 mm Type 2: 1 - 15x / 4.67 x 3.5 - 0.311 x 0.233 mm Type 3: 2 - 30x / 2.33 x 1.75 - 0.155 x 0.117 mm Type 4: 4 - 60x / 1.165 x 0.875 - 0.07 x 0.068 mm Type TZ: 1 - 120x / 4.67 x 3.5 - 0.039 x 0.029 mm Type A: 0.35 - 3.5x / 13.3 x 10 - 1.33 x 1 mm |
| Auto focus | Type 1, 2, 3, 4 and TZ come with TTL laser AF and vision AF. Type A comes with vision AF as standard and with laser AF as an option. |
| Illumination | Type 1/2/3: LED episcopic and diascopic illuminators, 8-segment LED inner and outer ring illuminators (37 degree incident angle with inner ring and 55 and 78 degree incident angles with outer ring) Type TZ: LED episcopic, diascopic (for main objective lens) and darkfield illuminators Type 4/A: LED episcopic and diascopic illuminators, 8-segment LED ring illuminator (with oblique angle of 50 degree: type 4, 18 degree: type A) |
| Power source | AC 100-240V 50/60Hz |
| Power consumption | 5A-2.5A |
| Dimensions & weight (W x D x H) | Main unit & table: 700 x 730 x 1795 mm / 245 kg (27.5 x 28.7 x 70.6 in. / 540lb.) Controller: 190 x 450 x 440 / 15 kg (7.5 x 17.7 x 17.3 in. / 33 lb.) |
| Footprint | 2100 x 1100 mm |
OTHER NEXIV MODELS :
NEXIV VMZ-K3040 - Ground-breaking multi-functional confocal video measuring system
The Confocal NEXIV can be optimally used for measurements of a variety of bump heights on advanced IC packages such as wafer-level CSP, as well as for the inspection of highly complicated structures of MEMS and probe card.
NEXIV VMZ-H3030 - High-precision Model
The NEXIV VMZ-H3030 achieves measurement at the highest precision of the NEXIV series, as well as advanced usability and performance.
NEXIV model with the highest precision
- EUX, MPE, EUY,MPE : 0.6 + 2L / 1000 um
- EUZ, MPE : 0.9 + L / 150 um
- XYZ Stroke: 300×300×150 mm
NEXIV VMZ-S3020 - Higher speeds than ever before
High-speed, High accuracy, and Easy Tolerance measurement at the micro level. Reaching the peak of video measurement within a compact system